Achieves excellent hardness and wear resistance by adopting high-purity ceramics.
High hardness and excellent wear resistance can be obtained by adopting high-purity ceramics in the wafer polishing process, and a good surface condition can be maintained for long-term use.
Keywords: High hardness, Wear resistance
|Shape||Convex, concave, and flat surfaces are available|
|Accuracy||Flatness 1 μm or less|
|Application example||Wafer fixing jig|