It is a damage-free transfer arm that can withstand high temperatures. In addition, it is also possible to coat the ceramic surface with a coating such as DLC (Diamond Like Carbon) to improve functionality, such as mitigating damage to sliding mating materials and preventing the diffusion of impurities.
Keywords: high temperature resistance
|Material||Alumina, Silicon Carbide|
|Size||For φ200 ⁄ 300 mm equipment|
|Application example||Wafer transport|