Equipped with a high-performance AC servo motor, it achieves high-speed transfer with ample payload capacity. Robots, load ports, and hands can be arranged optimally; we have inherited over 20 years of robot technology operating in harsh environments.Learn More
300mm wafers are transported one by one to cassettes (containers) A to B.
Compatible cassettes (containers) are FOUP, FOSB, OPEN, and PFA.
The standard transport is in units of 1 sheet, but transport in units of 5 or 25 sheets is also available.
This equipment is a system that replaces the dicing frame for 200mm and 300mm stored in a specified cassette with a standard cassette.
The cassettes used are 6-sheet cassettes and 13-sheet cassettes. Each cassette is supplied to the stage by an operator.
Back and forth (X-axis), swivel (θ-axis), up-and-down (Z-axis) + hand rotation (0 to 180°) operations are possible, supporting wafer transfer in the atmosphere. The drive motor is an AC servomotor with absolute encoder specifications for all axes.Learn More
Hardware, software programming, machine development, Ceramic table, Micro-precision punch & die, and more. AST has engineering experience for electrical wiring as well.Learn More