This equipment is a system that replaces the dicing frame for 200mm and 300mm stored in a specified cassette with a standard cassette.
The cassettes used are 6-sheet cassettes and 13-sheet cassettes. Each cassette is supplied to the stage by an operator.
|Thickness||1.22 ± 0.08mm|
|Warp||0.25mm or less|
|Contactable range||Back side|
|Career||Standard cassette||Cassette with 6 sheets・Cassette with 13 sheets|
|Frame storage pitch||15mm|
|Throughput||Takt time・Transportation time||180 seconds/13 sheets or less|